Berkeley Engineering Home
Volume 2, Issue 5
July 2002



Outline List

In This Issue
The Death and Rebirth of Silicon

UC Berkeley's New Fat Pipes

Art, Technology, Process, and Product

The Tinkertoys of Nanotechnology

Berkeley Engineering History: Engelbart invents the mouse

Archives

2002
May/June
April
Feb/March
January

2001
Nov/Dec
Sept/Oct
July/Aug

Lab Notes, Research from the College of Engineering


The Death and Rebirth of Silicon
by David Pescovitz

Profs. Hu, Bokor and King

Professors Hu, Bokor, and King inspect wafers, whch are fabricated in the MicroLab, then measured here, in the Device Characterization Lab in Cory Hall. (Click for larger image.)
Peg Skorpinski photo

The future of computing is headed toward a brick wall. Within a decade or so, the silicon industry's rule of thumb known as Moore's Law — which predicts that the number of transistors that will be packed on a silicon integrated circuit doubles every 18 months — be vetoed by the laws of physics and economics. Or will it?

"We think we can keep shrinking the transistor for another 20 years," says Chenming Hu of the Department of Electrical Engineering and Computer Sciences who, with faculty colleagues Jeff Bokor, Tsu-Jae King, Vivek Subramanian, and a team of graduate students, created new transistors that enhance performance while also enabling chips to keep shrinking. "Even if the brick wall faced by Moore's Law can't be toppled, it certainly could be pushed further out," says Hu.

To extend the life of Moore's Law in the long-term, and improve computing power in the short-term, the Berkeley researchers are proposing two new paradigms in silicon transistor design: FinFET (Fin Field Effect Transistor) and UTB (Ultra-Thin Body). Ten times smaller than today's transistors, the FinFET and UTB devices measure less than 100 atoms across. Their Lilliputian scale means that a trillion transistors could be packed on a chip that today holds a mere one billion. That increase in processing power could lead to ultra-fast and hyper-realistic medical simulations, handheld foreign language translators that work in real time, and computers that respond to natural spoken language.

To understand how Berkeley broke the world record in silicon scaling, a bit of transistor terminology is necessary. Complementary metal-oxide semiconductor (CMOS) is the technology commonly used to fabricate transistors. Semiconductors are exactly what the name implies — the material conducts electricity with varying levels of success. Also, impurities such as boron can be added to the semiconductor to selectively enhance its conductivity. This process, called "doping," results in a semiconductor with either an abundance of mobile positive charge (a "p-type" material) or an abundance of mobile negative charge (an "n-type" material).

probe station

Probe stations, such as this one in the Device Characterization Lab, measure devices as small as a single transistor. (Click for larger image.)
Peg Skorpinski photo

The transistor itself contains three terminals: the source, the gate, and the drain. In the most common transistor type, the source and the drain, doped n-type material, resides in a p-type body. The conductivity of the p-type region between the source and drain is controlled by the gate, which is located directly above the channel with a thin interposing oxide layer. This layer is needed to prevent electrical current from flowing between the gate and the channel. The size of a transistor actually refers to the length of the gate, which corresponds to the spacing between the source and the drain. Applying a positive voltage to the gate attracts the negatively charged electrons from the source into a surface channel, creating a continuous n-type layer for current to flow between the source and drain. At this point, the transistor is "on." If the voltage at the gate is removed, the n-type channel layer cannot be maintained, switching the transistor "off."

The problem is that as the gate length is shrunk and the source and drain are pushed so close together (less than 100 atoms apart), more electrons can sneak through during the "off" state.

Prof. Tsu-Jae King

Professor Tsu-Jae King looks at a wafer, whose fine features will be etched with some of the world's smallest transistors. (Click for larger image.)
Peg Skorpinski photo

In the FinFET design, a thin vertical silicon "fin" is built between the source and drain. Then the gate electrode material is deposited on both sides of the fin resulting in a double gate structure, one on each side of the channel.

"It's like trying to stop a bleeding vein," Hu says. "You could press down on the vein, but it would be much more effective if you could get another finger behind the vein and pinch it closed."

Hu, Bokor, and King's second transistor design, the Ultra-Thin Body device, employs a very different engineering innovation to shorten gate lengths while preventing leakage. In today's transistors, most of the leakage occurs deep in the body of the transistor below the gate. The UTB approach is to eliminate that material except for the top-most portion of the channel that is well-controlled by the gate.

Your Turn

How long can new paradigms in silicon scaling keep the industry from hitting a brick wall?

We want to hear from you...

"To continue the bleeding analogy, the UTB approach is like closing off a vein by pushing it against a hard surface like a bone," Hu says.

With the end of silicon in sight, the Berkeley research into FinFET and UTB structures is cranking along with an emphasis on honing the production process for mass manufacture. Once the advantages are on the table and the manufacturing kinks ironed out, it's up to the private sector to take the ball and run with it.

"The brick wall facing today's transistors is still a ways off," Hu says. "The industry can continue for a while. But at what point would a company become more competitive to convert to our new structure? Our challenge is to make that switch more compelling."




Chenming Hu

Tsu-Jae King

Jeffrey Bokor

Vivek Subramanian


Lab Notes is published online by the Public Affairs Office of the UC Berkeley College of Engineering. The Lab Notes mission is to illuminate groundbreaking research underway today at the College of Engineering that will dramatically change our lives tomorrow.

Editor, Director of Public Affairs: Teresa Moore
Writer, Researcher: David Pescovitz
Designer: Robyn Altman

Subscribe or send comments to the Engineering Public Affairs Office: lab-notes@coe.berkeley.edu.

© 2002 UC Regents. Updated 6/20/02.